1. Lub Ntsiab Lus thiab Cov Ntsiab Cai Tseem Ceeb ntawm High-Speed ​​Rotary Unions

Lub koom haum sib koom ua ke ceev ceev yog lub tshuab sib kis thiab sib dhos ua ke uas muaj kev ua haujlwm siab, uas nws lub luag haujlwm tseem ceeb yog ua kom muaj kev sib kis tas mus li ntawm cov khoom siv (kua, roj, pa, thiab lwm yam) ntawm cov khoom siv sib hloov (rotor) thiab cov kav dej ruaj khov (stator). Nws qhov txiaj ntsig tseem ceeb ntawm kev sib khi yog kev ruaj khov thiab kev ntseeg siab ntawm kev sib kis uas hloov kho rau cov xwm txheej ua haujlwm ceev ceev. Piv nrog cov koom haum sib koom ua ke ib txwm muaj, cov koom haum sib koom ua ke ceev ceev tau dhau los ua qhov kev tsim kho kom zoo rau cov xwm txheej ceev ceev, feem ntau hloov kho rau qhov ceev ntawm 3000-15000r / min, thiab tuaj yeem ua tiav kev ua haujlwm ceev ceev ntawm ntau dua 20000r / min los ntawm kev tsim qauv tshwj xeeb (xws li kev ua kom zoo dua qub thiab kev siv cov khoom siv sib dua).

Nws lub hauv paus ntsiab lus ua haujlwm tseem ceeb yog nyob ntawm kev koom tes ua ke ntawm lub kaw lus precision bearing thiab cov qauv sib xyaw ua ke: cov bearings precision (feem ntau yog cov angular contact pob bearings lossis ceramic rolling bearings) yog lub luag haujlwm los txhawb nqa lub kaw lus tig, ua kom muaj coaxiality thiab kev ua haujlwm du ntawm qhov ceev ceev, thiab tswj cov radial runout ≤ 0.02 hli; cov qauv sib xyaw ua ke (feem ntau yog graphite-silicon carbide mechanical seal, ua ke nrog polytetrafluoroethylene auxiliary seals) tsim ib qho kev sib txuas ruaj khov ntawm qhov chaw tig thiab qhov chaw ruaj khov los ntawm kev teeb tsa lub siab tshwj xeeb, zoo thaiv cov xov xwm xau, thaum txo qhov kev sib txhuam ntawm qhov chaw sealing thiab ua kom muaj kev ruaj khov ntawm kev ua haujlwm ntev ntawm qhov ceev ceev.

2. Cov Cheeb Tsam Tseem Ceeb thiab Cov Kev Cai ntawmCov Koom Haum Rotary Ceev Ceev

Cov koom haum sib koom ua ke ceev ceev yog siv dav hauv cov khoom siv siab heev nrog cov kev cai nruj ntawm kev ceev, kev ua haujlwm sealing thiab kev huv nruab nrab. Cov xwm txheej siv sib txawv sib xws rau kev siv tshuab meej.

2.1 Kev Ua Haujlwm Tshuab

Nws feem ntau yog siv rau lub tshuab spindle ntawm cov chaw ua haujlwm ceev ceev thiab CNC lathes. Nws lub luag haujlwm tseem ceeb yog xa cov kua txias (xws li emulsion, roj txiav) lossis cua compressed mus rau lub spindle thiab cov cuab yeej tig ceev ceev, ua kom cov cuab yeej txias, tshem tawm cov chips thiab lubrication spindle. Qhov xwm txheej no yuav tsum tau lub koom haum rotary kom hloov kho rau qhov ceev ntawm 8000-12000r / min, nrog rau qhov xau ntawm lub foob ≤ 0.1cc / h, thiab nws yuav tsum muaj cov kua txiav corrosion tsis kam thiab kev co tsis kam kom ntseeg tau tias qhov khiav radial ntawm lub spindle tsis cuam tshuam rau qhov tseeb machining.

2.2 Kev Siv Tshuab Ntim Khoom

Nws yog siv rau cov kab ntim khoom ceev ceev thiab cov tshuab ntim khoom tig, siv rau kev xa cov khoom siv kua (xws li dej haus, kua ntses) lossis cov khoom siv pneumatic sib dhos ua ke, kom ntseeg tau tias cov txheej txheem ntim khoom txuas ntxiv mus thiab ruaj khov. Lub koom haum tig yuav tsum muaj qhov ceev ntawm 3000-6000r / min, lub qauv kaw tsis muaj lub kaum sab xis kom tsis txhob muaj kuab paug nruab nrab, thiab tib lub sijhawm hloov kho rau cov khoom siv kaw khoom noj (xws li roj hmab fluoro-roj hmab zaub mov), ua raws li cov qauv kev huv ntawm cov tshuab zaub mov.

2.3 Cov Khoom Siv Hluav Taws Xob Cua

     Nws yog siv rau lub kaw lus tswj suab ntawm cov chaw tsim hluav taws xob cua, lub luag haujlwm rau kev xa cov roj hydraulic lossis roj, tswj kev hloov kho lub kaum sab xis ntawm cov hniav, thiab xyuas kom meej tias lub tshuab ua haujlwm ruaj khov hauv qab qhov ceev cua sib txawv. Qhov xwm txheej no xav tau lub koom haum rotary kom hloov kho rau qhov ceev ntawm 5000-8000r / min, muaj kev tiv taus kub siab thiab qis (-40 ℃ ~ + 80 ℃) thiab tiv taus xuab zeb, cov qauv sealing yuav tsum tiv taus siab siab (≤10MPa), thiab muaj kev ua haujlwm sealing ntev kom txo qhov zaus ntawm kev ua haujlwm thiab kev saib xyuas.

2.4 Kev Tsim Khoom Siv Semiconductor

Nws yog siv rau hauv wafer etching, nyias zaj duab xis deposition thiab lwm yam khoom siv. Nws lub luag haujlwm tseem ceeb yog xa cov khoom siv ultra-pure (xws li dej ultra-pure, cov pa roj tshwj xeeb). Lub rotary union yuav tsum muaj qhov ceev ntawm 6000-15000r/min, qhov chaw sealing siv cov qauv tsim tsis muaj cov khoom me me, qib kev huv nruab nrab ncav cuag Chav Kawm 10 kom tiv thaiv cov khoom tsis huv los ntawm kev ua qias tuaj rau wafer, thiab nws kuj muaj kev tiv thaiv corrosion kom hloov kho rau qhov xav tau kis ntawm cov pa roj tshwj xeeb (xws li hydrogen fluoride, ammonia).

3. Cov Tswv Yim Rau Kev Ntev Lub Neej Kev Pabcuam thiab Kev Txij Nkawm Cov Lus Qhia TxogCov Koom Haum Rotary Ceev Ceev

Lub neej ua haujlwm ntawm cov koom haum sib koom ua ke ceev ceev feem ntau nyob ntawm qhov hnav ntawm qhov chaw sib khi, kev poob ntawm cov kabmob thiab kev teeb tsa raug. Ua ke nrog nws cov yam ntxwv ua haujlwm, nws yog qhov tsim nyog los ua raws li peb lub hauv paus ntsiab lus tseem ceeb ntawm "kev huv, kev lubrication thiab kev sib dhos". Cov lus qhia tshwj xeeb yog raws li nram no:

3.1 Kev Tswj Xyuas Kev Huv Huv Nruab Nrab thiab Ib puag ncig

Qhov huv nruab nrab yog qhov tseem ceeb rau kev ua kom lub neej ua haujlwm ntawm qhov chaw sib khi. Yuav tsum muaj lub lim dej precision (kev lim dej raug ≤5μm) ntsia rau ntawm qhov kawg ntawm cov kav dej xa mus rau nruab nrab kom tsis txhob muaj cov khoom khov thiab cov khoom tsis huv nkag mus rau hauv qhov sib txuas ntawm lub sealing, ua rau khawb thiab hnav ntawm qhov chaw sib khi; tsis tu ncua ntxuav cov dej ntws sab hauv ntawm lub rotary union kom tiv thaiv kev sib xyaw ua ke thiab kev ua kom nruab nrab. Tshwj xeeb tshaj yog rau cov xov xwm kub siab (xws li roj hloov cua sov), nws yog qhov tsim nyog los kuaj xyuas qhov viscosity thiab cov ntsiab lus tsis huv ntawm nruab nrab, thiab hloov cov xov xwm puas tsuaj raws sijhawm. Tib lub sijhawm, tsis txhob cia qhov sib koom ua ke raug plua plav thiab cov pa roj corrosive, thiab ntsia lub hau tiv thaiv yog tias tsim nyog.

3.2 Kev Txij Nkawm Siv Lubrication Science

Xaiv cov roj tshwj xeeb (xws li cov roj ceev ceev thiab cov roj kub siab, qhov kub thiab txias siv tau -20 ℃ ~ + 150 ℃) raws li cov xwm txheej ua haujlwm, thiab ntxiv lossis hloov nws tsis tu ncua. Lub voj voog hloov pauv raug kho raws li qhov ceev thiab cov xwm txheej ua haujlwm, thiab nws raug hloov txhua 3-6 lub hlis nyob rau hauv cov xwm txheej ua haujlwm ib txwm muaj; qhov ntau ntawm cov roj txhaj tshuaj yuav tsum tau tswj hwm ntawm 1/2-2/3 ntawm qhov ntim ntawm cov kabmob kom tsis txhob muaj cov pa roj carbon kub siab los ntawm kev txhaj tshuaj ntau dhau lossis kev sib txhuam qhuav ntawm cov kabmob los ntawm kev txhaj tshuaj tsis txaus. Nws raug txwv tsis pub hloov cov khoom tshwj xeeb nrog cov roj ib txwm kom tiv thaiv kev puas tsuaj ntawm cov kabmob vim yog kev ua tsis tiav ntawm lubrication.

3.3 Kev Tswj Xyuas Qhov Tseeb ntawm Kev Teeb tsa thiab Kev Sib Tov

 Thaum lub sijhawm teeb tsa, nws yog qhov tsim nyog los xyuas kom meej tias qhov yuam kev coaxiality ntawm lub koom haum rotary thiab lub ncej tig yog ≤0.05mm, thiab qhov kawg runout yog ≤0.03mm, yog li kom tsis txhob muaj lub zog tsis sib xws thiab kev hnav sai ntawm qhov chaw sealing los ntawm kev ua haujlwm eccentric; lub flange mounting yuav tsum tiaj tus, thiab cov fastening bolts yuav tsum tau nruj kom sib npaug kom tiv thaiv kev sib koom ua ke deformation; ua ntej kev ua haujlwm, nws yog qhov tsim nyog los ua qhov kev sim tsis muaj load, xyuas qhov ceev, kev co thiab xau, thiab muab tso rau hauv kev ua haujlwm load tsuas yog tom qab lees paub tias tsis muaj qhov tsis zoo. Tom qab kaw, nws raug pom zoo kom ntws cov khoom sab hauv, tshwj xeeb tshaj yog cov khoom yooj yim crystallized thiab solidified (xws li cov kua txias qis-kub), kom tiv thaiv cov khoom nruab nrab los ntawm kev khov thiab ua puas rau cov foob thiab bearings.

3.4 Kev Tshuaj Xyuas Tsis Tu Ncua thiab Kev Kho Qhov Teeb Meem

Tshawb xyuas cov kev ua haujlwm ntawm lub rotary union tsis tu ncua, suav nrog qhov ceev, kub, tus nqi co thiab xau. Yog tias muaj kev co tsis zoo (tus nqi co > 2.5mm/s), lub foob xau ntau dhau lossis qhov kub ntawm qhov sib koom ua ke ntau dhau (> 80 ℃), nws yog qhov tsim nyog yuav tsum kaw kom kuaj xyuas raws sijhawm; xyuas qhov hnav ntawm cov foob tsis tu ncua. Yog tias pom khawb, puas tsuaj lossis laus ntawm qhov chaw sealing, nws yog qhov tsim nyog los hloov lub rooj sib dhos sealing ntawm tib yam specification thiab cov khoom siv raws sijhawm kom tsis txhob nthuav dav qhov txhaum.

4. Xaus Lus

Ua ib qho tseem ceeb ntawm cov khoom siv siab heev, kev ua tau zoo ntawm cov koom haum rotary ceev ceev cuam tshuam ncaj qha rau kev ruaj khov ntawm kev ua haujlwm, kev ua haujlwm raug thiab lub neej ua haujlwm ntawm cov khoom siv. Los ntawm kev piav qhia txog nws cov ntsiab cai tseem ceeb, cov kev cai lij choj uas tau hloov kho rau ntau qhov chaw sib txawv, thiab ua raws li cov lus qhia txog kev tu cev, kev siv roj thiab kev sib dhos, nws lub neej ua haujlwm tuaj yeem ntev dua thiab kev ua haujlwm thiab kev saib xyuas tus nqi tuaj yeem txo qis. Hauv kev siv tiag tiag, nws yog qhov tsim nyog los xaiv cov qauv khoom tsim nyog raws li cov xwm txheej ua haujlwm tshwj xeeb (kev ceev, nruab nrab, siab, kub) kom ntseeg tau tias nws ua haujlwm tau zoo tshaj plaws.